Integrating QUDT with ALD Experimental Template

[SameerSamji]

The ALD Experimental Template has been integrated with the QUDT ontology to provide additional context and detail for measurement-related properties. However, there are some aspects that require clarification:

1. Certain properties in the schema, such as growthPerCycle and nucleationPeriod, are not explicitly represented as quantities in the QUDT ontology. Instead, only their units of measurement can be mapped.

   • Does it make sense to represent these properties solely with their units?
   • Alternatively, should we consider mapping them to another ontology that better captures their semantics?

2. For programmatically grounding the QUDT ontology within the extracted schema, we could use LLMs. The approach would involve:

   • Identifying leaf properties in the schema.
   • Using an LLM to suggest appropriate QUDT entities for the relevant properties.

ALD Experimental Schema with QUDT Link: https://orkg.org/template/R1366244

[SameerSamji]

Based on the finalized ALD experimental schema, I have identified a set of measurable properties that can be partially or fully grounded using the QUDT ontology. These properties include:

Temperature, Pressure, GrowthPerCycle, nucleationPeriod, DosingTime, PurgeTime, RefractiveIndex, AbsorptionCoefficient, Resistivity, CarrierDensity, Mobility, Variation, FilmDensity

Here not all properties currently have direct mappings to both qudt:QuantityKind and qudt:Unit within QUDT. There are two different cases for grounding the QUDT ontology with the ALD experimental Schema. These are as follows:

Case 1: Full Grounding — Both qudt:QuantityKind and Units Available
In this case, the property is directly supported by QUDT with an existing QuantityKind and corresponding applicable units.

Example: Temperature
qudt:QuantityKind: qudt-quantitykind:Temperature
Applicable units: Celsius, etc.

Schema Representation
[Quantity1] (class qudt:Quantity)
qudt:quantityValue -> [quantityValue1] (class qudt:QuantityValue)
qudt:unit -> [DEG_C] (class qudt:unit)
qudt:numericValue -> [10] datatype:decimal
qudt:hasQuantityKind -> [Temperature] (class qudt:Temperature)

Case 2: Partial Grounding — Unit Available, No QuantityKind Defined
In this case, the property does not have an explicit QuantityKind in QUDT, but applicable units exist.

Example: GrowthPerCycle
No defined qudt:QuantityKind for "growth per cycle"
A relevant unit is available: Nanometer

Schema Representation
[Quantity2] (class qudt:Quantity)
qudt:quantityValue -> [quantityValue2] (class qudt:QuantityValue)
qudt:unit -> [NanoM] (class qudt:unit)
qudt:numericValue -> [2] datatype:decimal

One solution that can be applied here is to use base quantitykind entities where a QuantityKind is not currently defined in QUDT. So in the case of growth rate, we can use either Dimensionless or Length entities.